EUV Lithography

Tin droplet source nozzle releasing a falling chain of molten metal droplets, purple and gold housing

Cooling jets misting a glowing curved metal edge, sparks flying through the vapour

A laser striking a falling tin droplet, flattening it into a glowing plasma disc that emits EUV light

Close-up of the plasma ignition — a bright burst of light and sparks erupting where the laser meets the droplet, inside the vacuum chamber

Interior of the optics chamber, a laser beam bouncing between a chain of large curved mirrors

A silicon wafer under a cone of light on the scanner stage, chip dies reflecting in rainbow colours

Extreme close-up of a wafer surface, a grid of chip dies in shifting blue, green and amber hues

Microscopic view of chip interconnects, rows of metal contacts with gold solder points

Close-up of etched chip structures, grey trenches with gold-capped contact points